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MEMSnet Home: MEMS-Talk: Chrome mask for silicon etching in KOH
Chrome mask for silicon etching in KOH
2005-06-13
Nik Dee
2005-06-13
[email protected]
Chrome mask for silicon etching in KOH
Nik Dee
2005-06-13
Dear all,
I am using a 100-150 um Chrome mask to etch <100> silicon in KOH under
80 C. After 12-15 minutes the Chrome mask layer seems to be attacked by the
solution. Any ideas how i can possibly overcome this problem.

Nik Dee
reply
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