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MEMSnet Home: MEMS-Talk: Etching of Cr on Silicon
Etching of Cr on Silicon
2005-06-14
Daniel Schwaab
2005-06-14
Brent Garber
2005-06-14
Bin Liu
2005-06-15
Transene
2005-06-15
Kasman , Elina
Etching of Cr on Silicon
Brent Garber
2005-06-14
There are many commercially available Cr etches e.g. Cyantek CR7, and
Transene makes a Cr etch.

Brent

Daniel Schwaab wrote:

> I want to remove a Cr layer which I used as a mask for RIE etching of a
> silicon wafer.
> Which method is best to remove the Chromium without damaging the silicon?
reply
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