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MEMSnet Home: MEMS-Talk: reg: wet etching of Ti
reg: wet etching of Ti
2005-06-15
Krishna Vummidi
2005-06-15
Brent Garber
2005-06-15
Sunny Kedia
reg: wet etching of Ti
Krishna Vummidi
2005-06-15
is there a non-HF based solution to wet etch Ti and also shouldnt attack
photoresist. might be im asking for too much!
thanks,
krishna
reply
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