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MEMSnet Home: MEMS-Talk: reg: wet etching of Ti
reg: wet etching of Ti
2005-06-15
Krishna Vummidi
2005-06-15
Brent Garber
2005-06-15
Sunny Kedia
reg: wet etching of Ti
Brent Garber
2005-06-15
Krishna,

Sure there is!  Hard bake your resist, and etch your Ti in warm (50c) H2O2.  Try
to finish your etch all at one.  Taking
the sample in and out of the etch starts to make the resist brittle.

Brent

Krishna Vummidi wrote:

> is there a non-HF based solution to wet etch Ti and also shouldnt attack
> photoresist. might be im asking for too much!
reply
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