A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: reg: wet etching of Ti
reg: wet etching of Ti
2005-06-15
Krishna Vummidi
2005-06-15
Brent Garber
2005-06-15
Sunny Kedia
reg: wet etching of Ti
Sunny Kedia
2005-06-15
Krishna,

Ti Etchant from Transene TFTN, is a HCL based chemistry etchant. It has good
selectivity to Photo resist; however the etching proceeds at 65C, so you
need to heat the etchant.

Sunny
University of South Florida
College of Marine Science
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Process Variations in Microsystems Manufacturing
The Branford Group
Harrick Plasma, Inc.