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MEMSnet Home: MEMS-Talk: Dielectric strength of SiO2 depending on temperature ???
Dielectric strength of SiO2 depending on temperature ???
2005-06-15
Mario Kupnik
Dielectric strength of SiO2 depending on temperature ???
2005-06-15
Imran Ghauri
Dielectric strength of SiO2 depending on temperature ???
Imran Ghauri
2005-06-15
Mr. Mario, Can you share with me the info. that you
have about Dielectric strength of SiO2 with temp. that
you already have.
Thanks in Advance.

Imran

--- Mario Kupnik  wrote:

> Does anyone know (or a reference) how the dielectric
> strength of thermal
> grown SiO2 (dry oxidation, > 1 micron) behaves over
> a wide temperature
> range, i.e. from 300K up to 1300K !!! I know that it
> will go down
> drastically with temperature.
>
> I found a lot of information for room temperature
> and temperatures
> up to 400K but nothing for this range.
reply
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