Dear Michael,
take a look at http://www.kern-microtechnic.com/2-Test-Silicon.html
We've got one Kern HSPC at my old university and it's really an
awesome machine for using "classical" methods at the micro scale.

Regards,

Martin

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Martin Heller
Fraunhofer Institute for Silicon Technology

Alderete, Michael wrote:
> Does anyone have experience with the mechanical machining of thick
> [approximately 4 mm thick] Silicon?
>