To those who have expertise in charge trapping, charge injection,
leakage current, and other electrical failure modes of MEMS devices, I
have the following questions for you.  This is for a high field and high
frequency application.

1.   If I use high quality dielectrics, such as thermal oxide on top of
the fixed conductor, can I use an unipolar signal to drive the membrane
pull-in without causing charge trapping/charge injection problem?

2.   With a high-quality thermal oxide layer on the fixed conductor, can
I eliminate charge build up by using a bipolar signal?

3.   With a LPCVD nitride layer on the fixed conductor, can I eliminate
charge build up by using a bipolar signal?

4.   Is there any good paper in the area?  Who is the world expert in
electrostatic mems device?

Nancy Jia
Phone: 585 422-7374
Email: [email protected]