Dear MEMS researchers:
Could anyone tell me where we can buy SOI wafers for
a reasonable price. Our specs include: 2 in diameter,
oxide thickness 1 - 2 um, and top silicon layer thickness
5 - 15 um.
Thanks in advance.
Regards,
Suresh G.K. Ananthasuresh
Assistant Professor
297 Towne Building, MEAM
The University of Pennsylvania
220 S. 33rd Street, Philadelphia, PA 19104-6315
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Towne Tel: (215) 898-7191; Grasp lab Tel: (215) 898-2430
FAX: (215) 573-6334
E-mail: [email protected]
URL: http://www.seas.upenn.edu/~gksuresh
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