the only thing I can tell you is the thickness (d) is proportional to the
inverse of the square root of the spincoating (v):
d ~ v^(-1/2)

Julie Verstraeten  a écrit :

Hello All,

I'm looking for any formula that relates the layer thickness to de rotation
velocity in the spin-coating process for AZ 5214E photoresist.

Could anyone help me?

Thank you

Regards,
Julie.