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MEMSnet Home: MEMS-Talk: Divots in Wafer
Divots in Wafer
2005-06-17
Anton V. Chakhmatov
Divots in Wafer
Anton V. Chakhmatov
2005-06-17
Hello,

After snapping the wafer into small strips using a diamond scribe and
two glass slides, I noticed that this creates a lot of small divets on
the surface that are visible under a 5x microscope. The surface looks
straight and smooth with a naked eye. I was wondering if anyone had a
method of snapping them that doesn't produce as much stress.
reply
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