I would like to make a film of ZnO to test a chemical sensor. I do not
know much about sputter deposition, but I am working with a colleague
to use his chamber for sputtering. He has DC magnetron to sputter
metals, but he is not familiar with sputtering insulators. So I thought
maybe we can sputter metallic Zn in small partial pressure of oxygen.
Does anyone have experience with this? Or to recommend references on
this type of deposition?