Hi Simon,
You can use metallic Zn with some oxygen feedthrough.
Or You can use RF Sputtering. That is the sputtering
technique dedicated for dielectric. You can use Zn
target or ZnO target.
Best,
haroon


I would like to make a film of ZnO to test a chemical
sensor. I do not
know much about sputter deposition, but I am working
with a colleague
to use his chamber for sputtering. He has DC magnetron
to sputter
metals, but he is not familiar with sputtering
insulators. So I thought
maybe we can sputter metallic Zn in small partial
pressure of oxygen.
Does anyone have experience with this? Or to recommend
references on
this type of deposition?




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