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MEMSnet Home: MEMS-Talk: contamination after KOH etching
contamination after KOH etching
2005-06-23
Bo He
2005-06-24
Dan.W.Chilcott
2005-06-25
Michael L
contamination after KOH etching
Bo He
2005-06-23
Dear All:

       Our substrate is electroplated Ni and PVD Ni on silicon. After KOH
etching of Si, the Ni surface looks "yellowlish" and we have tried using
different kinds of acids(hcl,h2so4,hno3) to remove this contamination but
neither works. Any suggestions?

Many thanks.

Bo


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