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MEMSnet Home: MEMS-Talk: Reg: problems with SU-8 bonding to the silicon wafer
Reg: problems with SU-8 bonding to the silicon wafer
2005-06-23
Vishwanath Somashekar
2005-06-23
[email protected]
2005-06-23
Vishwanath Somashekar
Thin PDMS Films
2005-06-24
[email protected]
2005-06-25
Tolga Kaya
2005-06-27
Patrick Roman
2005-06-23
Brubaker Chad
2005-06-24
Brubaker Chad
2005-06-27
Vishwanath Somashekar
2005-06-29
Brubaker Chad
2005-06-30
Vishwanath Somashekar
Reg: problems with SU-8 bonding to the silicon wafer
Vishwanath Somashekar
2005-06-23
Hi,
Thanks for the response. I have tried to spin the second layer of SU-8
before doing the PEB and devoloping of the first layer. However, I
seem to land into a problem of aligning the second layer. I can barely
see the the alignment markers which are placed in the first layer for
me to help align the second layer. Any suggestions regarding this
would help a lot.

Again Thanks for all the help..

Cheers,
Vishwa
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