Bo-
It is possible to oxidize the nickel in KOH. Nickel oxide can be difficult to
remove. I do not have a process for removing the oxide but the oxide can be
altered by changing the bath temperature and concentration.

Dan Chilcott
MEMS Advanced Development
Delphi Corporation

 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Bo He
Sent:   Thursday, June 23, 2005 12:49 PM
To:     [email protected]
Subject:        [mems-talk] contamination after KOH etching

Dear All:

       Our substrate is electroplated Ni and PVD Ni on silicon. After KOH
etching of Si, the Ni surface looks "yellowlish" and we have tried using
different kinds of acids(hcl,h2so4,hno3) to remove this contamination but
neither works. Any suggestions?

Many thanks.

Bo


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