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MEMSnet Home: MEMS-Talk: how to process hydrophilic bonding?
how to process hydrophilic bonding?
2005-07-05
NL
2005-07-06
Sumant Sood
2005-07-07
Brubaker Chad
2005-07-08
Simon Garcia
how to process hydrophilic bonding?
NL
2005-07-05
Dear all:
   Now I`m try to do some hydrophilic bonding.At first, Si wafers are cleaned by
standard RCA1.But even after treated by
HNO3+HF(65%HNO3:48%HF:H2O=5:100:0.001),Si wafers do not wettable.Is the recipe
right? Please help me!Thanks a lot.
                                                       Nielei



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