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MEMSnet Home: MEMS-Talk: Reflow for SU-8 photoresist
Reflow for SU-8 photoresist
2005-07-03
mathew varghese
2005-07-05
Michael L
2005-07-06
mohammed ashraf
2005-07-06
Lee Pang
2005-07-05
Brubaker Chad
Reflow for SU-8 photoresist
Lee Pang
2005-07-06
Mohammed,

Can you elaborate on your process?  I've done reflow before with AZ100,
but the processing of the photoresist is a lot more difficult that with
SU-8.  If I can achieve the same results with SU-8 that would be great.

Lee

mohammed ashraf wrote:
> Hi Mathew
>
> We have done some thermal reflow of SU8 cylinders,which in turn get
> tranformed to hemispheres.Ofcourse our aim was to make microlenses.I
> guess you can use other shapes like cubes,cuboids,ellipses,etc to get
> your desired profile.
>
>
> Mohammed Ashraf
>
>
>
reply
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