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MEMSnet Home: MEMS-Talk: How to etch Ta or Ti?
How to etch Ta or Ti?
2005-07-07
SC Wang
How to etch Ta or Ti?
SC Wang
2005-07-07
Hi.

I am trying to use Ta/Au or Ti/Au to replace of Cr/Au. Does anynoe knows the
thickness of Ta/Au or Ti/Au? And What is the wet etchant of  Ta or Ti?

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