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MEMSnet Home: MEMS-Talk: Force actuator and capacitive measurement.
Force actuator and capacitive measurement.
2005-07-08
Julie Verstraeten
Force actuator and capacitive measurement.
Julie Verstraeten
2005-07-08
Hello,

I'm working on a capacitive microforce sensor. I will soon need to calibrate it.
For that purpose, I need to apply known forces on the tip of a 50micron x
70micron cross-section probe and measure the resulting change of capacity.

Does someone have some advice about which kind of actuator to choose for the
application of forces (0-200microN) and which kind of capacitance measurement
circuit (C~e-13F) to build.

Thank you very much,


Julie.
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