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MEMSnet Home: MEMS-Talk: SPR 220-3 Au plating problem
SPR 220-3 Au plating problem
2005-07-12
Mehmet Unlu
2005-07-12
Tolga Kaya
SPR 220-3 Au plating problem
Mehmet Unlu
2005-07-12
Hi everyone,
we are trying to replace SJR 5740 with SPR 220-3 for electroplating
process. However we observed that SPR220 can not withstand inside the
cyanide gold plating solution even for a hardbake temperature of 120 C
for 12 hours.  For SJR 5740, we managed to achieve very stable features
for a plating duration of 30 minutes. The hardbake temperature for SJR
5740 is 80 C for 12 hours. Do you have any experience about the
durability of SPR 220-3? Do you have any alternatives to be used as mold
photoresist for 30-40 minutes of gold plating?
Thanks in advance.

Mehmet Unlu
Research Assistant
Ph. D. candidate
MEMS-VLSI Group
Electrical-Electronics Eng. Dept.
Middle East Technical University
Ankara, Turkey
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