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MEMSnet Home: MEMS-Talk: clean a silicon surface
clean a silicon surface
2005-07-14
Jeaneth Corredor
2005-07-14
Brent Garber
2005-07-15
Simon Garcia
2005-07-14
Gary
clean a silicon surface
Brent Garber
2005-07-14
Dear Jeaneth,

HF works well to remove oxide off your silicon, but a piranha etch really
cleans (H2SO4 and H2O2 (warm)).

Brent

Jeaneth Corredor wrote:

> I need to clean a silicon surface.  I know that it
> should be made with HF but I don't know the details of
> the procedure of cleaning.
> can some of you give me this information? thank you
reply
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