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MEMSnet Home: MEMS-Talk: unbinding silane from silicon surface
unbinding silane from silicon surface
2005-07-18
[email protected]
2005-07-18
Joshi Manoj Achyutrao
2005-07-18
Cristi Lepadatu
unbinding silane from silicon surface
[email protected]
2005-07-18
dear all:

how can I clean the silicon surface after functionalized by silane like APTES or
MPTS? does acetone work?

best

Yu Chen
reply
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