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MEMSnet Home: MEMS-Talk: Planetary fixture for evaporator
Planetary fixture for evaporator
2005-07-21
Mike Whitson
Planetary fixture for evaporator
Mike Whitson
2005-07-21
Hello,

Can anyone suggest a vendor for a planetary system for 4" wafers that will fit a
24" diameter CHA belljar?  The fixtures from CHA seem incredibly overpriced.

Thanks,
Mike Whitson

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