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MEMSnet Home: MEMS-Talk: RE: SiNx dry etch
SiNx dry etch
2005-07-21
William Lanford-Crick
RE: SiNx dry etch
2005-07-22
Tripp, Marie Kathleen
Diaphragms
2005-07-28
anurekha
2005-07-29
shay kaplan
2005-07-30
anurekha
RE: SiNx dry etch
Tripp, Marie Kathleen
2005-07-22
Hi Bill,  Cl2 + Ar will work... But depending on why you are trying to avoid F,
Cl may be worse...  -Marie

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