A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: S1813: time and temperature hardbake before Si DRIE
S1813: time and temperature hardbake before Si DRIE
2005-07-22
Julie Verstraeten
2005-07-22
Robert Black
2005-07-22
Bill Moffat
S1813: time and temperature hardbake before Si DRIE
Bill Moffat
2005-07-22
Julie,
      For really vertical side walls that are close to impervious to
temperature profile changes up to temperatures like 400 C you need image
reversal. Contact me for all the details.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
The Branford Group
Tanner EDA by Mentor Graphics