MEMS-talk

News	MEMSnet Home: MEMS-Talk: Coating of Poly Si with a Ferromag Matl !!!! Pyrex wafer anodically bonded to Thin Silicon Problem 2005-08-01 Zoberbier, Margarete 2005-08-01 Tony Rogers Coating of Poly Si with a Ferromag Matl !!!! 2005-08-01 Namit Singh How to etch Silicon into oblique walls using ICP? 2005-08-01 ning 2005-08-01 Hongjun-ECE 2005-08-02 ning 2005-08-03 David Nemeth Coating of Poly Si with a Ferromag Matl !!!! Namit Singh 2005-08-01 Hi, I need to coat a beam of Poly Si (450x25x2.5 um) with a ferromagnetic material of thickness around 1-2um.What is the best method of doing it and can anyone suggest a specific material for it? Thank you in anticipation! Sincerely, Namit. reply
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