Dear Researchers
I wish to use LPCVD polysilicon for piezoresistors on silicon nitride or silicon
dioxide cantilever beams. I wish to know the optimum thickness and doping
concetration for high piezoresistivity. For my work, I want to use polysilicon
thickness as minimum as possible which can effectively work for high
piezoresistivity.
Any kind of suggestion regarding this matter would be highly appreciated.
Thanx in advance.

Best regrads
Prem Pal