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MEMSnet Home: MEMS-Talk: SOI substrate specifications
SOI substrate specifications
2005-08-04
mathew varghese
2005-08-04
OVERSTOLZ Thomas Christian
2005-08-09
Gert Eriksen
SOI substrate specifications
mathew varghese
2005-08-04
Hello evryone..
  I'm trying to design an SOI based 3D solenoid inductor . Can somebody please
tell me if  SOI wafers can be brought outright or if I  have to integrate  the
three layers myselves ( subsrate , oxide film , thin film silicon)? Also what
are the typical thickness of each layer or are they application based?

Thanking you.
Regards.
Mathew
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