Hi Mathew,

Yes you can buy SOI wafers with specific handle/box/device layer thickness. In
general, SOI wafers are custom made, and delivery time can be quite long.
Sometimes, SOI suppliers also have a minimum lot of 25 wafers you have to buy,
some suppliers also have inventory list on their website with very short
delivery time. In the past we had wafers from:

www.siegertcon.com
www.icemostech.com
www.ultrasil.com
www.universitywafer.com


Quality can be very different, and good SOI wafers are expensive (~250 $/each).
Typical handle thickness is 350 - 500 µm, BOX ~2 µm (for MEMS), and device layer
~5 - 100 µm, depending on application.

Hope this helps.

Thomas Overstolz



-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of mathew varghese
Sent: jeudi, 4. août 2005 05:45
To: [email protected]
Subject: [mems-talk] SOI substrate specifications

Hello evryone..
  I'm trying to design an SOI based 3D solenoid inductor . Can somebody please
tell me if  SOI wafers can be brought outright or if I  have to integrate  the
three layers myselves ( subsrate , oxide film , thin film silicon)? Also what
are the typical thickness of each layer or are they application based?