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MEMSnet Home: MEMS-Talk: any special trick for taking SEM of PDMS
any special trick for taking SEM of PDMS
2005-08-03
[email protected]
2005-08-04
abong
2005-08-16
Woo-Jin Chang
2005-08-16
Cristi Lepadatu
2005-08-17
Scott Walck
2005-08-17
Cristi Lepadatu
2005-08-19
Isaac Wing Tak Chan
any special trick for taking SEM of PDMS
abong
2005-08-04
it's hard to see PDMS..

as a matter of fact on all dielectric material..


On Wed, 3 Aug 2005 [email protected] wrote:

> Hello,
>
> I'm having difficulty taking SEM for PDMS.
> I coat a thin layer of gold about 150A on PDMS.
> However the SEM resolution is so low for some reason. I took the SEM for the
> master, which is photoresist. I can see 0.25um feature. However for PDMS, the
> image is blur even for 10um feature. I am just wondering if I miss something.
> Or it just hard to see PDMS.
reply
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