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Question About Index of Refraction
2005-08-04
Eric J. Correa
2005-08-05
emelianov
Index of Refraction and Stress
2005-08-05
jedidi nader
Question About Index of Refraction
emelianov
2005-08-05
Hello Eric,

normally for (quasy)unknown RI will be good following procedures:
- prism coupler (for thick films and substrates with lower RI as your
diamond film)
- (spectroscopic)ellipsometry (for thin films and substrates with known RI).
To simplify your analysis with this procedures you need to know the
thickness of your films.
I used for prism coupler the 'metricon 2010' from atos GmbH and
for ellipsometery the 'Sentech Senduro' from Orbis Technologies Ltd.

Best regards,

Vitali Emelianov

-----Ursprüngliche Nachricht-----
Von:  Eric J. Correa
Gesendet: Thursday, August 04, 2005 22:10
An: [email protected]
Betreff: [mems-talk] Question About Index of Refraction

Hello Everyone:

I am trying to perform characterization on diamond films in terms of
thickness and I having some issues measuring the thickness of the films
across the wafer.  The main problem that I am having is that I do not know
the index of refraction of the diamond film.  I was wondering if someone
knows about any method or company able to measure the value of n for a
specific material.  So far, I have tried the elipsometer but since I do not
know the thickness and neither the index of refraction I am having wrong
measurements.

I will appreciate any idea or suggestion.
reply
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