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MEMSnet Home: MEMS-Talk: Metal deposition on unexposed SU-8
Metal deposition on unexposed SU-8
2005-08-08
Aniruddh Sarkar
2005-08-09
Peter Svasek
2005-08-08
Jobert van Eisden
2005-08-08
Brubaker Chad
Metal deposition on unexposed SU-8
Aniruddh Sarkar
2005-08-08
Hi,

I am looking for a way to deposit a thin metal film on unexposed SU-8 without
exposing it in the process.

PVD sources seem to generate enough light to expose it, while in most kinds of
sputtering too there seem to be enough UV as well as high energy particles
around.

I have been considering electroless deposition but don't know how to activate
the surface.

Any ideas?

--
Regards,
Aniruddh
Microelectronics Lab, IIT Bombay
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