Hi All,
Can anyone share me some general information about how to determine the
kinetic constants? I'm doing research on release etch modeling. I tried to
use a combined first-and-second order model, where J is represented as: J =
k1 * Cs + k2 * Cs^2. However, I have difficulty to determine the kinetic
coefficient k1 and k2.
Any suggestions and information are highly appreciated!
Best,
Yi