Bill,

I have a concern with lift-off of aluminum in general, as I understand it, the
only 'Clariant AZ Developer' will not etch aluminum. Do you have any comments? I
intend to use image reversal with AZ 5214E and this developer. AZ 326B killed my
aluminum lift-off process using ordinary postive-tone. Thanks.

Thomas

________________________________

From: [email protected] on behalf of Bill Moffat
Sent: Fri 8/12/2005 1:14 PM
To: General MEMS discussion
Cc: Lori Cantrell
Subject: RE: [mems-talk] Lift-off using imige reversal

A negative sloped side wall is essential  Using image reversal the flood
exposure controls the side wall angle from a +22 degrees through
vertical to -22 degrees or slope back.  Using this for example Cray
Research when they produced chips for the Cray super computer had a
number of image reversal systems and were producing 0.1 Micron metal
lines.  Other customers use the vertical side walls for plate up and
produce 30 Micron thick copper with vertical walls inside 40 micron
vertical wall trenches.