Incident angle for Silicon thickness measurement
using ellipsometer
Han G. Yoo
2005-08-15
Hello,
I use a J. A. Woollam WVASE32 (variable angle spectroscopy) with 65, 70
and 75 degrees as the incident angles. I use different wavelength though
(from 0.73 eV to 4.58 eV).
Best,
Han Yoo
