Te-Chun,

There should be a lot of second-hand Karl Suss MJB3 UV400 aligners
available for sale. It should be under 10K. You can do a search on Google.
SFU has STAR research group in Engineering Science department doing
in-house fabrication of amorphous silicon ICs. They should have aligners
suitable for your needs.

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo


On Fri, 19 Aug 2005, TC (Te-Chun) Wu wrote:

> Hi!  We want to find a cheap/ affordable (under 10K USD) UV exposure
> system for SU-8. Does anyone recommend some model?  thanks.