A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Stresses of SiO2 and Si3N4
Stresses of SiO2 and Si3N4
2005-08-20
Kavin
2005-08-22
Lou Chomas
patterned nano dots
2005-08-23
li cai
Stresses of SiO2 and Si3N4
Kavin
2005-08-20
Hello everyone,

I am wondering whether anyone of you can inform me
some data or reference on stresses of SiO2 deposited
on poly-Si and Si3N4 deposited on SiO2?

Thanks in advance.

Kavin Zhan
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
University Wafer
Addison Engineering