I am characterising my sputtering process for depositing piezoelectric PSZT
films.
Please advise of a basic test, for this or other piezoelectric films,using
electrodes to measure voltage and varying force on the films to see if the
deposited films are piezoelectric.
I have tried some tests but these have been inconclusive.
Too much force was required and the samples of PSZT on Si substrates were
damaged.

Thank you

Anthony Holland