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MEMSnet Home: MEMS-Talk: copper wet etch with small undercut
copper wet etch with small undercut
2005-08-24
Yuzhu Li
2005-08-24
Isaac Wing Tak Chan
copper wet etch with small undercut
Yuzhu Li
2005-08-24
Hi, anyone know a copper wet etch that gives small side etch? need to
etch about 1um copper but need to control sideetch: several micron's
sideetch is not acceptble...

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