A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RE: Selective Cu & Cr Etchant
RE: Selective Cu & Cr Etchant
2005-08-30
Rajib mukherjee
RE: Selective Cu & Cr Etchant
Rajib mukherjee
2005-08-30
Hi,

I have used the same process as you require--Electroplating Ni on Cu/Cr and
etching Cu/Cr with nickel intact. Use Nanostrip to selectively etch Cu/Cr
without etching Ni. It does a very good job.Took me around 2-3 mins for
200nm of Cu on 50nm of Cr.

regards
Rajib
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Tanner EDA by Mentor Graphics
Addison Engineering
Process Variations in Microsystems Manufacturing