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MEMSnet Home: MEMS-Talk: Spin on dielectric layers
Spin on dielectric layers
2005-08-31
Ho Yin Chan
2005-09-01
[email protected]
Spin on dielectric layers
Ho Yin Chan
2005-08-31
Hi all,

  I am fabricating a typical transistor recently. But, due to the
unavailability of the SiO2 deposition system, I use SiO2 as an dielectric
layer. So, I am looking for other alternatives. I think the only process I
can do is spinning or thermal evaporation. I am thinking of spin-on-glass
(SOG). Do you guys have experience on this and would like to kindly sharing
with me? Also, do you have any other alternatives?
Thank you so much.
  Looking forward to hear you.

Best regards,
Hoyin
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