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MEMSnet Home: MEMS-Talk: MEMS switch contact dimple
MEMS switch contact dimple
2005-08-31
erkin seker
2005-09-01
Phillipe Tabada
2005-09-01
David Nemeth
Surface Planarization
2005-09-05
erkin seker
2005-09-01
Lou Chomas
2005-09-01
[email protected]
2005-09-01
Bill Moffat
MEMS switch contact dimple
Bill Moffat
2005-09-01
Image reversal on the first layer makes it impervious to most chemical
reactions. The sensitizer is turned into acid then neutralized so
developer does not affect it.  As an example of its stability it will
not flow at 400 degrees C.  Contact me for free tests.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353

-----Original Message-----
From: Phillipe Tabada
Subject: RE: [mems-talk] MEMS switch contact dimple

Hi Erkin

  Look up processes involving UV hardening your PR and then placing it
under elevated temperatures in order to crosslink the polymers.  This
should prevent the first layer of PR from dissolving when the second
layer of PR is deposited.

Phil Tabada
reply
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