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MEMSnet Home: MEMS-Talk: about the etching of Manganese alloy.
about the etching of Manganese alloy.
2005-09-02
biqin huang
about the etching of Manganese alloy.
biqin huang
2005-09-02
hi, does anyone have experience with the etching of Manganese alloy.
basically, it is composed of Cobalt,Manganese and Aluminum.

what kind of etchant could be used?

Thanks
bq
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