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MEMSnet Home: MEMS-Talk: Poor adhesion between Ag and Si
Poor adhesion between Ag and Si
2005-09-07
wangx
2005-09-07
Shay Kaplan
2005-09-07
Hongjun-ECE
2005-09-13
Zeta Tak For YU
Poor adhesion between Ag and Si
wangx
2005-09-07
Dear MEMS community:
Could any of you give me some suggestion on how to improve the adhesion
between Ag and Si? I tried  a thin layer of Cr or Ti by PVD, but it did
not really work, cause the Ag layer peeled off easily when i did some
electrochemical experiment. Could you give me some detailed information
or parameters, if you have the corresponding experiences. Thanks in
advance!

Best Regards

Xuemei Wang
reply
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