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MEMSnet Home: MEMS-Talk: Re:Rép.: [mems-talk] Oxidize Silicon
Rép. : [mems-talk] Oxidize Silicon
2005-09-09
Laetitia Philippe
Re:Rép.: [mems-talk] Oxidize Silicon
2005-09-09
[email protected]
Re: Rép. : [mems-talk] Oxidize Silicon
2005-09-09
Jim Beall
Re: Rép. : [mems-talk] Oxidize Silicon
2005-09-09
mizur
Re:Rép.: [mems-talk] Oxidize Silicon
[email protected]
2005-09-09
I have Gold pattern on the sample and meling point of Gold is 1064oC.
if I want to do it at 1000oC or 900oC, what should be the time by your
expection?
I do not need to be accurate. 20-50nm of SiO2 is fine

best

Yu Chen

Quoting Laetitia Philippe :

> Hallo Chen,
>
> you can do a thermal oxidation, typically 1100C for one hour under
> oxygen atmosphere
reply
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