Hello!!
 my major is MEMS.
 these day, i can't etch Ba and Sr by RIE.
 i used O2 gas for etching
 and i have Ar, O2, SF6, CHF3 gas for a RIE
 so.. i want to know how can i etch that materials.
 please reply to me!!
 my e-mail adress is "[email protected]"
 bye