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MEMSnet Home: MEMS-Talk: Testing piezoelectric nature and reducing cracks in PZT
Testing piezoelectric nature and reducing cracks in PZT
2005-09-20
Rajib mukherjee
Testing piezoelectric nature and reducing cracks in PZT
2005-09-21
Tolga Kaya
Testing piezoelectric nature and reducing cracks in PZT
Rajib mukherjee
2005-09-20
Hi all,

I have a PZT/PT/Pt/Ti/SiO2/Si layer sequence.I need to test the
piezoelectric/ferroelectric nature of the film.Is there any method to poll
and test the layer without depositing the top electrode? and can anyone
suggest how the C-V curves will look like for this since the P-E curves are
hard to obtain with a keithley measurement system. And I have a lot of
surface cracks on my PZT layer deposited by solgel after annealing (using
the F2 mitsubishi precursor solution). If somebody suggests a solution for
these problems it will be greatly appreciated.

Thanks and regards
Rajib

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