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MEMSnet Home: MEMS-Talk: Ni /Au adhesion
Ni /Au adhesion
2005-10-12
sc wang
2005-10-12
Nano-Master
2005-10-12
Hongjun-ECE
Ni /Au adhesion
sc wang
2005-10-12
HI.

I have tried depositing Ni/Au(E-GUN) on bonding pad, but got poor adhesion.
(Ni=500A, Au=5000A)
So far, I tried Ni-Silide to improve the adhesion, but still can't work.
Is there any idea can improve Ni/Au adhesion?



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