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MEMSnet Home: MEMS-Talk: SU8 adhesion
SU8 adhesion
2005-10-12
Lung-hao Hu
2005-10-17
Thomas Xu
2005-10-18
Joseph Grogan
2005-10-18
GARCIA BLANCO Sonia
SU8 adhesion
Thomas Xu
2005-10-17
Lung-hao,

You may spin coat a thin layer of SU-8 on glass
substrate first followed by standard soft bake, flood
expose ,PEB, develop, rinse and dry, hard bake. Then
do the same process to make your SU-8 mold on it. SU-8
will have good adhension on SU-8 layer and the first
SU-8 layer also have good adhension to glass since the
interfacial area is large.

Good luck.

Thomas

--- Lung-hao Hu  wrote:

> I am using SU-8 to be a mold on glass substrate
> and then pour PDMS on the top of this mold to build
> up a microfludic device.
> After developing SU-8, the whole mold is stripped.
> The reason why I guess is that the interfacial area
> bewteen SU-8 and glass is
> pretty small, therefore the adhesion is not good.
> Is there any product that can enhance the adhesion
> between SU-8 and glass.
reply
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